- 2025-07-22
Ultrapure water
Core water quality indicators
Resistivity ≥18.2 MΩ·cm (25℃)
TOC content ≤5μg/L
Particle control>0.1μm (count <1/mL)
Total bacteria <0.1 CFU/mL
Multi-stage purification process architecture
1. Pretreatment unit
Two-stage reverse osmosis system (recovery rate 75-80%)
Online degassing device (dissolved oxygen <0.1mg/L)
2. Deep purification module
Electrodeionization device (EDI)
Module current density 3-5A/dm²
Continuous regeneration without chemical agents
Terminal fine treatment
Nuclear grade mixed bed resin (polishing accuracy 0.05μS/cm)
254nm+185nm dual wavelength ultraviolet sterilization
Key system performance guarantee
Deep removal rate of boron element>99.9%
Silicon dioxide residue <0.1μg/L
System desalination rate is stable>99.99%
Industry customized implementation plan
Microelectronics field
Meet SEMI F63 ultra-trace metal requirements (Fe < 0.01ppb)
Constant temperature water supply system (25 ± 0.5 ℃)
Pharmaceutical industry
Comply with USP < 645 > conductivity specifications
Full pipeline 316L EP grade stainless steel
Energy equipment
Boiler feed water meets ASME PW-2019
Zero silicon scale guarantee (SiO₂ < 2μg/kg)
Intelligent operation management system
Multi-parameter online monitor (real-time tracking of TOC/resistivity/temperature)
Membrane performance early warning system (pressure difference fluctuation > 10% automatic alarm)
Remote data interaction platform (compatible with MODBUS/OPC protocol)
